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http://hdl.handle.net/11455/86291| 標題: | Effects of radio-frequency power on the properties of carbon thin films prepared by thermal chemical vapor deposition enhanced with remote inductively-coupled-plasma using acetylene/nitrogen mixtures | 作者: | Lai, Liang-Hsun Wu, Kuan-Chang Shiue, Sham-Tsong |
Project: | Thin Solid Films, Volume 570, Page(s) 356-362. | URI: | http://hdl.handle.net/11455/86291 | ISSN: | 00406090 | DOI: | 10.1016/j.tsf.2014.02.108 |
| Appears in Collections: | 材料科學與工程學系 |
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