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標題: Spray coating of anti-reflection thin film
作者: 謝佳樵
Chia-Chiao Hsieh
關鍵字: no;無
引用: 1.管從勝、王威強'氟樹脂塗料及應用' ,化學工業出版社,2005,北京,P.309-322 2.曹建明'噴霧學',機械工業出版社,2005,北京,P.10-12 3.李秉璋、王正和,'金屬反射膜材料簡介',89 年 12 月工業材料,168 期,p125-130。 4.周安琪,1976,薄膜材料,光電科技叢書,徐氏基金會,初版。 5.易明,1995,經典與現代光學,台灣高等教育發行,學英文化總經銷,台北。 6.岸川利郎著,杜光宗譯,2000,光學入門,建宏出版社。 7.李正中,2004.8,薄膜光學與鍍膜技術,藝軒圖書出版社,第四版,台北。 8. Walheim S., Schäffer E., Mlynek J., and Steiner U., 'Nanophase-Separated Polymer Films as High-Performance Antireflection Coatings,' Science, 283, 520-522, 1999. 9. Jeri'ann Hiller, Jonas D. Mendelsohn and Michael F. Rubner, Published online: 2 September 2002 ;doi:;10.1038/nmat719 10.Ishihara Y., Hirai T., Sakurai C., Koyanagi T., Nishida H., and Komatsu M., 'Applications of The Particle Ordering Technique for ConductiveAnti-Reflection Films,' Thin Solid Films, 411, 50-55, 2002. 11. H. Schmidt, M. Mennig, 2000, Wet Coating Technologies for Glass, Nov. 12.魏宏樺,'微快速原型系統之霧化鋪層技術研究',國立台北科技大學製造科技研究所碩士論文(2004) 13.思沛雅噴霧器材有限公司 14.王愉晴,'疏水性抗污材料以噴霧式塗佈法之研究',國立勤益科技大學化工與材料工程系研究所碩士論文(2011)
In this study, spray coating was implemented for the deposition of organic/inorganic hybrid anti-reflection (AR) thin film. Compared with the conventional physical vapor deposition (PVD) process, spray coating possesses advantages such as spraying coating of a single layer of low refractive (LR) material is enough to provide effective anti-reflection, AR films with various sizes can be fabricated, the cycle time is relative short, the cost is low, deposition on chip and mother glass can be conducted, and the expensive umbrella-shaped fixture is not required.

The low cost wet-spray process was implemented in this study. The optimal thickness of the deposited film having the best transmittance was measured to be 100.02 nm. This optimal film had an average water contact angle (WCA) of 92°−95°, which is within the scope of the standard. It was also observed that the spray coated AR thin films possessed better wear resistance than that deposited by the PVD process.

The optical characteristic of the spray coated AR films was characterized by the spectroscopic ellipsometer and the haze meter, while the physical characteristic was measured using the pencil hardness tester and the cross-cut test, the chemical resistance was investigated by the sweat test and the rganic solvent soak test, and the anti-smudge property was characterized using the permanent marker and the finger printing.

本研究使用溶膠凝膠法(Sol-gel)製備具抗反射性質的有機無機混成之抗反射(Anti Reflection)薄膜,AR by Spray 作業的優勢有搭配低折射率的 LR 材料,僅做一層 single layer 即可快速達到具有低反射效果的介面,鍍膜尺寸多樣化,可彈性應用於 cell 或中片作業,相較於蒸鍍製程,Spray 製程具有 cycle time 短的成本優勢,且無須依不同尺寸開立昂貴的蒸鍍傘架治具。

本研究成功的採用低成本的濕式製程之噴霧式(Spray)噴塗法進行作業,並成功找出最高穿透率之最佳的鍍膜厚度 100.02 nm,其平均水接觸角可維持在 92°~95°。除此之外,本研究在耐磨耗次數觀察比較下,也發現到抗反射材料在同為濕式製程的噴霧式與蒸鍍式之鍍膜下,其特性品質表現也會有所差異。

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