Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/91802
標題: Fabrication technology research of nickel nozzle plate for micro nebulizer
鎳質噴嘴片應用於微型霧化器之製作技術與研究
作者: Yun-Shan Jian
簡韻珊
關鍵字: micro-nozzle;Proximity printing;electroforming;微噴嘴;近接式曝光法;電鑄
引用: [1] Williams, R. L., W. P. Adams, G. Poochikian and W. W. Hauck. 'Content uniformity and dose uniformity: current approaches, statistical analyses, and presentation of an alternative approach, with special reference to oral inhalation and nasal drug products.' Pharmaceutical research, vol. 19, no. 4, pp. 359-366, 2002. [2] Yeo, L. Y., Friend, J. R and Mclntosh,M. P. 'Ultrasonic nebulization platforms for pulmonary drug delivery.' Expert opinion on drug delivery , vol. 7, no. 6, pp. 663-679, 2010. [3] Jeng, Y.-R., Tu, P.-Y., Feng, G.-H., Su, C.-H. and Peng Y.-Y. 'PZT bimorph actuated atomizer based on higher order harmonic resonance and reduced operating pressure.' Sensors and Actuators A: Physical , vol. 136, no. 1, pp. 434-440, 2007. [4] Brusiani, F., Falfari, F. and Pelloni, P. 'Influence of the Diesel Injector Hole Geometry on the Flow Conditions Emerging from the Nozzle. ' Energy Procedia, vol. 45, pp. 749-758, 2014. [5] Shen, S. C., Pan, C. T., Wang, Y. R. and Chang, C. C. 'Fabrication of integrated nozzle plates for inkjet print head using microinjection process.' Sensors and Actuators A: Physical ,vol. 127, no. 2, pp. 241-247, 2006. [6] Jeng, Y., C. Su, G. Feng and Y. Peng, 'An investigation into a piezoelectrically actuated nebulizer with μEDM-made micronozzle array.' Experimental thermal and fluid science , vol. 31, no. 8, pp. 1147-1156, 2007. [7] Wang, L., R. Stevens, A. Malik, P. Rockett, M. Paine, P. Adkin, S. Martyn, K. Smith, J. Stark and P. Dobson, 'High-aspect-ratio silica nozzle fabrication for nano-emitter electrospray applications.' Microelectronic engineering, vol. 84, no.5 ,pp. 1190-1193, 2007. [8] Lin, C.-Y., H.-C. Meng and C. Fu, 'An ultrasonic aerosol therapy nebulizer using electroformed palladium–nickel alloy nozzle plates.' Sensors and Actuators A: Physical , vol. 169, no. 1, pp. 187-193, 2011. [9] Shen, S.-C., Wang, Y.-J. and Chen, Y.-Y. ' Design and fabrication of medical micro-nebulizer.' Sensors and Actuators A: Physical , vol. 144, no. 1, pp. 135-143, 2008. [10] Shen, S.-C. 'A new cymbal-shaped high power microactuator for nebulizer application.' Microelectronic Engineering, vol. 87, no. 2, pp. 89-97, 2010. [11] Jeng, Y.-R., Su, C.-C., Feng, G.-H., Peng, Y.-Y. and Chien, G.-P., 'A PZT-driven atomizer based on a vibrating flexible membrane and a micro-machined trumpet-shaped nozzle array. ' Microsystem technologies, vol. 15, no. 6, pp. 865-873, 2009. [12] Lin, C. P., Yang, H.-R. and Chao, C.-K. 'A new microlens array fabrication method using UV proximity printing.' Journal of micromechanics and microengineering , vol. 13, no. 5, pp. 748, 2003. [13] Hung, C.-H. , Hung, S.-Y. , Shen, M.-H. and Yang, H.-R. “Semiellipsoid microlens fabrication method using UV proximity printing.' Applied Optics , vol. 51, no. 8, pp. 1122-1130, 2011. [14] F. M. Grimaldi, Adnexis, Bernia, 1665 [15] E.Hecht, OPTICS 4th, Addsion Wesley, 2002. [16] 趙凱華,鍾錫華,光學,儒林出版社,1994年 [17] 耿繼業,何建娃,幾何與物理光電實驗,儒林出版社,1994年 [18] 謝昇融,微型醫用鎳質霧化器製作技術研究,國立中興大學精密工程研究所碩士論文,2009 [19] 吳祥銘,鎳鈷合金微電鑄技術於微型模具成形之研究,國立中興大學精密工程研究所碩士論文,2003 [20] 楊文呈,壓花輪模具鎳磷合金電鍍製程,大葉大學機械工程研究所碩士論文,2006 [21] 蔡宗勳,高深寬比微電鑄技術與複製過程研究,國立中興大學機械工程學 系博士論文,2004 [22] 蘇葵陽、張良謙,實用電鍍原理與實際,復文書局,1999年8月 [23] THB-126N Technical Report for Cu Plating, JSR Corporation, Laboratories Micro fabrication Process Materials Laboratory [24] Kim, J. H. and Paik, K.-W. ' Investigation of Various Photo-Patternable Adhesive Materials and their Processing Conditions for MEMS Sensor Wafer Bonding.' 2011 IEEE 61st Electronic Components and Technology Conference, pp. 1839-1846, 2011. [25] 林韋翰,硬式與軟式導光板微結構製程技術研究,國立成功大學機械工程 學系碩士論文,2008
摘要: 
In this study, diffraction effect of proximity printing is used to fabricate the curvature of conical structure. Next, micro-nozzle plate with particular hardness was fabricated by electroforming. The dimension of micro-nozzle plate can be defined by the mask precisely. Three steps were included in this study. First, Trace Pro simulation soft was used to simulate the illumination distribution when light pass through the mask and gap. And the result of this simulation was used to design the mask. Second, the conical structure can be fabricated by photolithography. The top size of conical structure was 5.8 μm, bottom size was 15.5 μm and the height was 37 μm. After the pattern of conical structure was defined, the micro-nozzle with 4 μm apertures was deposited by electroforming. Third, Comsol simulation soft was used to analyze and simulate the velocity of flow and flow distribution.

本研究利用近接式曝光法(Proximity printing)產生的繞射效應(Diffraction effect),製備出有曲率之圓錐狀微結構,再結合電鑄技術形成具有硬度之噴嘴片,可藉由光罩定義尺寸大小來製作微噴嘴結構,能更精準的控制噴嘴尺寸規格。而本研究可分為三個部分,在第一個部分中,首先利用Trace Pro光學模擬軟體,模擬光線經光罩及間距後,在光阻表面所呈現的光照度分佈。並針對模擬結果去設計光罩;第二部份則是利用微影製程製作出頂端尺寸5.8 μm、底端15.5 μm、高為37 μm之圓錐狀微結構,再結合電鑄技術成功製作出孔徑大小為4 μm的微噴嘴片。而在第三個部分則是利用Comsol模擬軟體來模擬流速及流場分布,進而分析其可應用於微型霧化器之可行性。
URI: http://hdl.handle.net/11455/91802
Rights: 同意授權瀏覽/列印電子全文服務,2017-07-02起公開。
Appears in Collections:精密工程研究所

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