Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/91949
標題: 離子束轟擊對銅/鈷氧化物奈米雙層薄膜之結構及磁性質影響
The influence of ion-beam bombardment on Structures and Magnetic Properties of Cu/Co-oxide Bilayers
作者: 王立楷
Li-Kai Wang
關鍵字: 雙離子束濺鍍系統;銅/鈷氧化物雙層薄膜;Dual ion Beam Assisted Deposition;Cu/Co-oxide Bilayers
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摘要: 
In this study used ion beam assisted deposition (IBAD)for preparing Cu/Co-oxide bilayer films on SiO2 substrate .The structure and magnetic properties of two parts were characterized using X-ray diffraction (XRD), Transmission electron microscopy (TEM), Vibrating sample magnetometer (VSM), Electron spectroscopy for chemical analyzer (ESCA).

Using ion beam assisted deposition (IBAD) deposited Cu/Co-oxide bilayer by ion-beam bombardment let Co or Co-oxide to embed in copper
film , a cobalt-copper alloy formed in interface .By XRD and TEM results to know the structure is consisted of face-centered cubic (FCC) Cu (a~3.62 A)、rock-salt CoO (a~4.26 A)、face-centered cubic (FCC) Co (a~3.50 A)、belongs to spinel (spinel) structure Co3O4 (a~8.06 A) . The ESCA results to identified Cu-oxide on the interface of Cu and Co-oxide, Co-oxide layer is containing Co, CoO, Co3O4 . At low temperature a transition from paramagnetic to ferromagnetic or superparamagnetic behavior is observed.

本研究利用雙離子束濺鍍系統(IBAD),在二氧化矽基板上製備銅(Cu)/鈷氧化物(Co-oxide)雙層薄膜,鍍膜時間各為5分鐘,探討其結構、微結構及磁性質。
利用 X-ray 繞射分析確認其晶格結構,穿透式電子顯微鏡(TEM)進行晶粒尺寸分佈、成分結構與薄膜厚度分析,並與XRD的分析結果進行比對驗證。所產生之銅/鈷氧化物雙層薄膜之銅層具有面心立方堆積(FCC)結構,晶格常數約為3.62 A;鈷氧化物層具有兩種化合物,一為岩鹽(rock salt)結構之CoO,晶格常數約為4.26 A;另一為Co3O4屬於尖晶石(spinel)結構,晶格常數約為8.06 A。薄膜晶粒尺寸約為4~15 nm,銅膜厚度約為12.5 nm,鈷氧化層膜厚度約為10.0 nm。
利用化學分析電子能譜儀分析並與穿透式電子顯微鏡的分析結果進行比對驗證。所產生之銅/鈷氧化物雙層薄膜中,銅和鈷氧化物的界面含有銅的氧化物;鈷氧化物層含有Co、CoO、Co3O4。
磁性分析方面,使用振動樣品磁力計(VSM)在外加磁場(12k Oe),場冷至低溫(T=180 K)平行膜面(In-Plane)量測,有超順磁現象產生。
URI: http://hdl.handle.net/11455/91949
其他識別: U0005-2606201422325300
Rights: 同意授權瀏覽/列印電子全文服務,2016-12-16起公開。
Appears in Collections:材料科學與工程學系

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