Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/9339
標題: 鋁箔在有機溶劑中的浸蝕行為研究
The Etching Behavior of Aluminum Foil in Organic Solvents
作者: 馬照杰
Ma, Chao Chieh
關鍵字: aluminum;鋁;methanol;ethanol;etching;pH value;conductivity;hydrogen ion;alkyl;甲醇;乙醇;浸蝕;酸鹼值;導電度;氫離子;烷基
出版社: 材料工程學研究所
摘要: 
本論文主要在研究高純度鋁箔在各級醇類中的浸蝕行為及在含有水與不含水的環境下,其浸蝕效果的差異。藉由溶液濃度、導電度、酸鹼值及添加鹽類的調整,觀察鋁箔的表面形貌、重量損失等;並利用ESCA、SEM之分析工具,研究鋁金屬表面化學組態及形貌的改變,對鋁金屬在醇類中腐蝕行為做進一步探討。進而了解氫離子、氫鍵及烷基在反應中的角色。
對於在不含水的狀況下,以甲醇和乙醇兩種溶液加上AlCl3,其浸蝕效果最佳;而在含水環境下,在甲醇溶液中浸蝕效果明顯,但以95wt%CH3OH+5wt%H2O+AlCl3更為明顯。在乙醇溶液中以25wt%C2H5OH+75wt%H2O+AlCl3及100wt%H2O+AlCl3較為明顯。
本實驗對於鋁金屬蝕刻及平坦化製程具高度應用價值,且對於鋁金屬在水溶液及非水溶液系統中之電化學行為提出解釋。

This thesis studies the etching behavior of high purity aluminum in various aqueous and non-aqueous organic solutions. The effect of different parameters such as the solution concentration, conductivity, pH value and the amount of salt added was evaluated by the weight loss of aluminum. Surface analysis techniques such as ESCA and SEM were used to understand the chemical configuration transformation and surface morphology of the etched aluminum. The roles of hydrogen ion, hydrogen bond and alkyl are clarified.
In the non-aqueous solutions, the methanol and ethanol solvents added with AlCl3 show the best etching results in terms of weight loss; in the aqueous solutions, the etching result in methanol is good, but it is even better in the 95wt%CH3OH+5wt%H2O+AlCl3 solution. For ethanol, the best etching result occurs in the 25wt%C2H5OH+75wt%H2O+AlCl3 and 100wt%H2O+AlCl3 solutions.
The experiment is valuable in understanding the etching behaviors of aluminum and its planization process, and elucidates the electrochemical mechanism of aluminum both in aqueous and non-aqueous systems.
URI: http://hdl.handle.net/11455/9339
Appears in Collections:材料科學與工程學系

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