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標題: Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
作者: Fong, Chien-Fu
Dai, Ching-Liang
Wu, Chyan-Chyi
關鍵字: cadmium sulfide;heater;methanol sensor;tin dioxide;Cadmium Compounds;Methanol;Micro-Electrical-Mechanical Systems;Oxides;Sulfides
Project: Sensors (Basel, Switzerland), Volume 15, Issue 10, Page(s) 27047-59.
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
DOI: 10.3390/s151027047
Appears in Collections:機械工程學系所

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