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標題: 以ECR-CVD方法在鋁陽極處理膜上沉積納米級碳管之研究
Aligned Carbon Nanotubes on Anodic Alumina Membrane by ECR-CVD Synthesis
作者: 蔣復國
Chiang, Fu-Kuo
關鍵字: carbon;納米級碳管;nanotubes;ECR;CVD;anodic;alumina;鋁陽極處理膜;沉積
出版社: 材料工程學研究所
極 處理膜中以ECR-CVD方法合成納米級碳管.ECR-CVD具備低沉積溫
度, 低離子損傷, 高電漿密度及無污染性等優點,藉由控制鋁
陽極處理膜 的孔徑大小,可以在短時間內(四分鐘)合成230 nm
及30 nm 直徑大小 的納米級碳管, 所用的反應氣體為乙炔和氬氣
的混合. 利用SEM及TEM的觀察和Raman, FTIR, EELS等定性分
析, 可以知 道我們在鋁陽極處理膜中所合成的納米級碳管為
amorphous hydrogen-carbon 結構, 而非結晶性的石墨.

We have developed a new approach for preparing the
aligned carbon nanotubes in the pores of anodic alumina
membrane by electron cyclotron resonance chemical vapor
deposition (ECR-CVD). The advantages of ECR-CVD are low
deposition temperature, low ion damage, high plasma
density, contamination-free. The composite film made of the
aligned carbon nanotubes embedded in the porous anodic
alumina can be prepared in a short time of 4 min. Through
adjusting the pore size of the anodic alumina, various
diameters of the carbon nanotubes can be obtained in a
range of 30 to 230 nm. Precursor gases of the ethylene and
argon were mixed and introduced to the ECR-CVD reactor for
synthesizing the carbon nanotubes. The carbon
nanotubes in the anodic alumina as a whole were analyzed
by FESEM and were characterized by Raman spectroscopy as well
as FTIR. The individual carbon nanotubes were extracted from the
composite film and were analyzed by EFTEM. Results indicated
that the carbon nanotubes were composed of the amorphous
hydrogen-carbon instead of crystalline graphite.
Appears in Collections:材料科學與工程學系

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