Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/9424
標題: 磁控濺射沉積鉻基硬質鍍膜高溫氧化與機械性質之研究
Study on Unbalanced Magnetron Sputtering Deposition Chromium Base Hard Coatings on High Temperature Oxidation and Mechanical Properties
作者: 林建宏
Lin, Jian-Hong
關鍵字: Unbalanced Magnetron Sputtering;非平衡磁控濺射;CrN;Cr2O3;Coatings;Oxidation;Wear;氮化鉻;氧化鉻;鍍膜;氧化;磨耗
出版社: 材料工程學研究所
摘要: 
為使模具在加工過程更耐高溫氧化,抗腐蝕並提昇磨耗抵抗能力,通
常會在模具表面被覆一層保護性鍍膜,藉以延長模具壽命並改善被加工件
之精度。硬鉻、CrN、TiN是模具表面較常使用的硬質鍍膜;電鍍硬鉻具有
製程簡易之優勢,並對模具具有一定程度的保護效果,因此一直是模具用
硬質鍍膜的主流材料。TiN則擁有高硬度、與基材附著性良好之特點,因
此在模具應用上亦很廣泛,但多數鍍膜材料的抗氧化性及脫膜能力均不如
CrN鍍膜理想。一般認為CrN具有此類優勢係由於表面生成緻密的Cr2O3氧
化層所致。 磁控濺射所沉積的鍍膜一向以平滑、緻密著稱。近幾年非
平衡磁控濺射系統的開發更使鍍膜大面積被覆的均勻性改善,並提高沉積
效率。本研究即嘗試以非平衡磁控濺射系統沉積氮化鉻、氧化鉻與碳化鉻
鍍膜,並研究其高溫氧化行為與機械性質。 研究結果發現CrN在700℃
產生大量氧化,Cr2N於590℃發生、而CrC則始於630℃。經800℃恆溫1小
時氧化試驗得知CrN的氧化層深度低於Cr2N與硬鉻。熱重分析亦證實長時
間氧化過程,CrN形成的Cr2O3對不鏽鋼基材具有最佳保護效果,其形貌呈
皺折狀結構。其次為直接濺射被覆的Cr2O3鍍膜,其抗氧化性不如預期主
要係因鍍膜產生裂紋,但該鍍膜經高溫處理後表面仍相當平整。Cr2N的抗
氧化性顯然不如CrN,但優於TiN,其氧化層形貌呈粒狀結構。 本實驗
沉積之CrN經XPS分析其化學位移,發現其Cr 2p3/2束縛能位於575.10 eV
,Cr2N位於575.90 eV、而Cr2O3則位於576.5 eV。 以非平衡磁控濺射
沉積之CrN與鉻鉬鋼球對磨之摩擦係數僅有0.38,比陰極電弧電漿系統沉
積之CrN(0.42)低,亦低於Cr2N(0.56)、TiN(0.50)、硬鉻(0.61)
、TiAlN(0.58)。惟Cr2O3與CrC鍍膜在高速鋼之附著性不佳,未如來擬
實際工業應用即應設計複合鍍層改善其附著性。

In order to make the mold endure much more high
temperature oxidation, resist corrosion in the process of make,
and enhance the ability to resist tribology, we usually coat a
protecting layer on the surface of the mold so as to extend
mold''s lifetime and to improve the precision of the worked. Hard
chromium, CrN, and TiN are hard coating layer which are used
much more frequently on the surface of the mold. First electric
coating hard chromium is provided with the advantage of its
simple process, and certain degree of protection for the mold.
Therefore it is always the main stream material of hard coating
layer used on the mold. Secondary TiN is provided with high
hardness, and substrate adhesion. Therefore, it can be used
largely on application of the mold. But the anti-oxidation and
the mold release ability are less idea than CrN coating layer.
In most of coating layers, people believe that CrN owing the
dense Cr2O3 oxidation layer on the surface is provided with this
kind of advantage. The coating layer deposited by UBM system
is usually noted for its smoothness and density. In the past few
years, the development of UBM system improve the evenness of the
coating layer''s large measure of area, and enhance the
efficiency of the deposition. This research here engages in
trying to deposit CrN, Cr2O3, and CrC layers by UBM system and
to study it''s high temperature oxidation and mechanical
property. We found out in the result of the research that CrN
produce a great quantity of oxidation in 700℃, Cr2N in 660℃,
CrC in 630℃. Through the oxidation test of one hour at 800℃ in
the constant temperature. We know that the depth of oxidation
lay lower than Cr2N and hard chromium. Thermogravimetric
analysis also testify that Cr2O3, formed by CrN, is provided
with the best protective for stainless steel substrate, and is
with the shape of crease structure. Moreover, property of anti-
oxidation of the Cr2O3 coating layer is not as expected, owing
largely to rupture caused by coating layer. But its surface is
pretty smooth after the process of thermal treatment. Cr2N''s
property of anti-oxidation is apparently less than CrN, but
better than TiN, and shape of its oxidation layer is presented
granular construction. The CrN, deposited in this research,
is found out that it''s CrN 2p3/2 binding energy is situated in
576.5 eV, Cr2N in 575.9 eV, and and Cr2O3 in 576.5 eV.
URI: http://hdl.handle.net/11455/9424
Appears in Collections:材料科學與工程學系

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