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標題: 含鈦類鑽碳膜之微結構及殘留應力研究
Microstructure and Residual Stress of a Ti-Doped Diamond-Like- Carbon Film
作者: 謝文彬
Hsieh, Wen-Pin
關鍵字: DLC;類鑽碳膜;microstructure;residual stress;Electron Microscope;EELS;微結構;殘留應力;電子顯微鏡;電子能量耗失儀
出版社: 材料工程學研究所
經由TEM之橫截面(cross section)試片計算鍍膜之殘留應力,並與雷射掃
該區之繞射圖中發現其具有擇優選向 (preferred orientation) ,再經
曲的現象所計算得之殘留應力值為 ~10 GPa,而以雷射掃瞄法量測試片彎
具有很高之可信度;經由彈性力學所算得之熱應力為2.6 GPa,約佔鍍膜

The microstructure and chemistry of functionally gradient Ti-
doped diamond-like carbon films prepared by a closed field
magnetron sputtering system on an AISI 304 stainless steel was
analyzed by energy filtering transmission electron microscopy
(TEM), electron energy loss spectroscopy (EELS), high resolution
TEM, scanning electron microscopy (SEM), and glancing angle X-
ray diffraction. From both the TEM and X-ray diffraction results
, it was found that the microstructure across the coating
thickness direction from the substrate to the free surface are
304 stainless steel, Ti layer, TiN, a mixture of TiN and TiC0.7
N0.3, and a region consisting of TiC0.7N0.3、TiC、graphite、
diamond and amorphous carbon near the coating surface (< 500 a).
Also, observed from the cross-section TEM are the columnar
structure of the DLC coating and the presence of preferred
orientation in the coating illustrated by the arced SAD
patterns. Chemical analysis of the outmost coating layer (<300
a) was carried out by EELS. The carbon K-edge in the EELS
spectra of a Ti-rich region indicates the existence of Ti-C bond
formation, whereas amorphous carbon dominates in the Ti- lacking
region. To investigate the corrosion resistance of the Ti-doped
DLC films, the coated specimen was emerged in a H2SO4-containing
solution for various time and then examined by SEM and energy-
dispersive X-ray spectroscopy. It is shown that the DLC coating
has a good corrosion resistance and that the columnar structure
near the outmost surface was looser than that near subsurface
where diamond microcrystallites are present. In addition,
residual stress in the DLC films was measured both from a cross-
section TEM image and by a laser scanner system. From the
bending curvature of the DLC coated specimen, the residual
compressive stress was calculated to be ~10 GPa. Using an
elastic solution, the unrelaxed thermal stress due to a
difference in the coefficients of thermal expansion is
calculated to be 2.6 GPa. As a result,, it can be concluded that
the residual stress in theDLC coating was caused mainly by the
internal stress produced by the energetic ion bombardment during
Appears in Collections:材料科學與工程學系

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