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標題: 以低溫水熱法及化學電池作用於氮化鈦膜上製備鈦酸鋇膜之研究
Synthesis of barium titanate film on TiN-coated silicon by low temperature hydrothermal and galvanic couple methods
作者: 余錦智
關鍵字: BaTiO3;鈦酸備;TiN;low temperature hydrothermal;galvanic couple techniques;氮化鈦;低溫水熱法;化學電池作用
出版社: 材料工程學研究所
本研究主要採用以往文獻中未曾使用之氮化鈦(TiN)膜/Si來當基材,利用低溫水熱法直接浸泡及化學電池作用方式來成長鈦酸鋇薄膜,反應溶液為0.5 M醋酸鋇(Ba(CH3COO)2‧H2O)及2 M氫氧化鈉(NaOH)之電解液,探討在控制溶液溫度及反應時間之條件對鈦酸鋇膜成長之影響。

The objective of this research is to synthesize BaTiO3 on titanium nitride-coated Si using novel low temperature hydrothermal and galvanic couple techniques. A mixed solution of 0.5 M barium acetate (Ba(CH3COO)2H2O) and 2 M sodium hydroxide (NaOH) was employed as electrolyte to investigate influences of temperatures of the electrolyte and the reaction time on the growth BaTiO3 films.
XRD results reveal that both low temperature hydrothermal and galvanic couple techniques could be used to successfully prepare cubic BaTiO3 films with highly preferred orientation, which depended on the crystallized orientation of TiN/Si substrate. Furthermore, the BaTiO3 films with (211) preferred orientation can be observed on the Ti(002)/Si substrate by galvanic couple techniques.
A finely dispersed cubic phase BaTiO3 particles could be found after hydrothermal treatment of TiN/Si substrate at 80C for 5 minutes or at 60C for 2 hours, and the particles started to films at 80C for more then 2 hours. However, such the cubic BaTiO3 particles could be observed on TiN/Si substrate at 80C for only 1 minute by using the galvanic couple technique and continuous dense films at was formed 80C for 1 hour. Therefore, the growth rate of BaTiO3 on TiN/Si substrate by the galvanic couple technique is faster than that by the low temperature hydrothermal technique. The thickness difference of the BaTiO3 films between two methods was approximately 20-26 %. Furthermore, the growth rate BaTiO3 over layer on TiN/Si substrates is also faster and than that on Ti/Si substrate using the galvanic couple technique.
Moreover, above mentioned techniques for preparing BaTiO3 could avoid the contamination of BaCO3, which is often reported in literatures in synthesizing BaTiO3. This could make mass production feasible in the future.
Appears in Collections:材料科學與工程學系

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