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標題: 以UV光調控兆赫波段超穎材料的特性變化研究
The Properties of Terahertz Metamaterials Tuned by Ultraviolet Light
作者: 郭昱廷
Yu-Ting Kuo
關鍵字: 兆赫波;超穎材料;半導體;可調式;Terahertz;Metamaterials;Semiconductor;Tunable
引用: [1] G. V. Viktor. Soviet Physics Uspekhi 10, 509 (1968).. [2] M. Corvi and W. L. Schaich. Physical Review B 33, 3688 (1986). [3] Experimental Verification of a Negative Index of Refraction, R. A. Shelby, D. R. Smith et al, Science: Vol.292,Issue 5514, pp. 77-79,1058847.( 2001) [4] Jiang Zhu and George V. Eleftheriades, A Compact Transmission-Line Metamaterial Antenna With Extended Bandwidth, IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS, VOL. 8. (2009) [5] N. I. Landy, S. Sajuyigbe, J. J. Mock,2D. R. Smith, and W. J. Padilla1, Perfect Metamaterial Absorber, PRL 100, 207402. (2008) [6] C. Bo Han, H. You Zhe, L. Yung-Chiang and T. Din Ping. Selected Topics in Quantum Electronics, IEEE Journal of 19,4601305 (2013). [7] Tuning the Resonance in High Temperature Superconducting Terahertz Metamaterials Phys. Rev. Lett. (2010) [8] Terahertz superconducting metamaterials for magnetic tenability, J. Opt. 16 094013 (6pp) (2014) [9] Influence of film thickness in THz active metamaterial devices: A comparison between superconductor and metal split-ring resonators Appl. Phys. Lett. (2013) [10] Nonlinear response of superconducting NbN thin film and NbN metamaterial induced by intense terahertz pulses, New J. Phys. 15 055017,( 2013) [11] Mechanically tunable terahertz metamaterials Applied Physics Letters 102, 121101; doi: 10.1063/1.4773238.( 2013) [12] Kenji Nomural, Hiromichi Ohtal, Akihiro Takagi, Toshio Kamiya, Masahiro Hiranol and Hideo Hosono, Room-temperature fabrication of transparent flexible thin-film transistors, journal of Sol-Gel Science and Technology 55,322-327(2010) [13] D. R. Smith, Willie J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, Composite Medium with Simultaneously Negative Permeability and Permittivity, ,Phys. Rev. Lett. 84, 4184.( 2000) [14] 單迴路共振器超穎材料之濾波器設計,林毓麒,碩士學位論文 [15] Jining Li et al, Mechanically tunable terahertz metamaterials, Applied Physics Letters,2013A Design Rule for an ELC Resonator, Pratyush Pushkar, and Vibha Rani Gupta, IEEE Sponsored 2nd International Conference on Innovations in Information,Embedded and Communication systems (ICIIECS). (2015) [16] 非晶銦鎵鋅氧薄膜紫外光感測器,黃匡祿,碩士學位論文,國立中興大學物理研究所(2015) [17] 高靈敏銦鎵鋅氧薄膜氣體感測器特性研究,張凱維,碩士學位論文,國立中興大學奈米科學研究所(2015) [18] 非晶銦鎵鋅氧薄膜臭氧氣體感測器,江國禎,碩士學位論文,國立中興大學奈米科學研究所(2014) [19] 太赫滋波段高溫超導和金屬超穎材料上覆蓋半導體材料的特性研究,林晉緯,碩士學位論文,國立中興大學奈米科學研究所(2016) [20] Benjamin Crowell. Vibrations and Waves. Light and Matter online text series,Ch.2(2006)
本實驗我們研究缺口共振環(Split resonator rings)在兆赫波下量測其共振頻率。覆蓋半導體材藉由照射UV光來改變共振環上缺口的電容特性為主要目的。
金是本實驗組成超穎材料的要件,研究金超穎材料在不同厚度與退火前後的差異,從實驗與SEM、AFM量測圖分析得知,當膜厚愈薄,經退火後其訊號會消失,而在100 nm厚的金超穎材料經退火後,能有最好的訊號,其品質因子在退火前後能從4.18爬升到8.33。
當超穎材料覆蓋半導體銦鎵鋅氧(IGZO)後並進行照UV光,來看兆赫波共振強度的縮減,得到當薄膜電阻變化區間落在1 MΩ到 100 kΩ之間會有最佳的變化效果。利用此方式便能改變IGZO薄膜的導電特性,以達到光調控超穎材料的目的。

In this work, we measure the resonance frequencies of Split resonator rings at Terahertz wave. The samples are covered by semiconductor materials and illuminated by UV light to change the capacities of the splits on the resonator rings.
Gold is the important element of metamaterial. We study the properties of metamaterials in different thickness and experimental conditions. From the analyses of the experiments and pictures of SEM and AFM, we know that the signal would disappear with the thinner film. The metamaterial with thickness of 100 nm has the best signal after annealing, whose quality factor increase from 4.18 to 8.33.
When the metamaterials are covered by IGZO and illuminated by UV light, the electrical resistance changes from 1 M ohm to 100 k ohm, and we have best intensity of resonance decrease mostly at Terahertz spectrum. We can changing the conductivity of IGZO film to make tunable metamaterials.
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