Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/97834
標題: 以硼氮化物以及金屬氧化物作為分隔材料對FePt的磁性質和微結構探討
Magnetic properties and microstructure of FePt-(BN,Ag,C) and [FePt-Mg(Ti,Ta,Zr,Nb,B)O] granular films
作者: 陳俞任
Yu-Ren Chen
關鍵字: 鐵鉑;MgTiON;BN,Ag,C;Mg(Ti,Ta,Zr,Nb,B)O;磁性質;微結構;L10-FePt;MgTiON;BN,Ag,C;Mg(Ti,Ta,Zr,Nb,B)O
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摘要: 
本實驗主要分兩大部分,第一部分為利用BN-Ag-C分隔材料以及不同氮含量(原子百分比)之MgTiON中間層對於FePt的變化進行探討。第二部分則使用Mg(Ti,Ta,Zr,Nb,B)O合金靶材,以兩種不同的製備方法,將此金屬氧化物以中間層以及多層膜方式製備,探討對於FePt之磁性以及微結構的影響。
第一部分實驗中使用MgTiON(5 at%)作為中間層時,添加BN-Ag-C分隔材料會讓鐵白金晶粒改變成接觸角大於90度的球狀結構,並且擁有較高的垂直矯頑力表現,另外將3奈米的MoC沉積在MgTiON(5 at%)上時,鐵白金之晶粒呈現接觸角約47度的島狀結構,而垂直矯頑力有些微下降;使用MgTiON(15 at%)作為中間層時,由於介面能之改變,未添加BN-Ag-C分隔材料時鐵白金之晶粒呈現島狀結構且擁有最高之垂直矯頑力,而添加BN-Ag-C分隔材料後,鐵白金之晶粒形成長方及方形結構,其接觸角接近90度,最後將3奈米的MoC沉積在MgTiON(5 at%)上時,垂直矯頑力大幅下降且鐵白金形成雙層結構。
第二部分實驗中使用Mg(Ti,Ta,Zr,Nb,B)O作為中間層時,FePt薄膜呈現優先垂直各向異性,然而矯頑力低於參考FePt薄膜,可能是因為金屬元素從分隔中間層擴散到FePt顆粒中,而將Mg(Ti,Ta,Zr,Nb,B)O作為多層膜製備時,雖然有更低的垂直矯頑力,但其水平矯頑力較小且獲得具有更好的(001)晶體結構和與緻密圓頂形狀的FePt,更接近預期的柱狀晶粒結構,而在此部分提出了不同的製備方法得到不同形狀支鐵白金,這是未來可以應用及努力的方向。

In the first part, the microstructure and magnetic properties of FePt(BN, Ag, C) granular films grown on MgTiON intermediate layer with and without MoC inserting layer were studied. The FePt(BN, Ag, C) films show perpendicular magnetization and the highest out-of-plane coercivity was 15.8 kOe prepared on MgTiON(15at%) intermediate layer. In this sample, the FePt grains show square and rectangular islands with round corner and the contact angle was around 90o. The MoC with thickness of 3nm was capped on MgTiON(15at%) to compare the FePt grains morphology. The out-of-plane coercivity of 10nm thick FePt was down to 8.27kOe. The trapezoidal FePt islands with low contact angle (~47o) were always observed when FePt film prepared on MoC(3nm)/MgTiON and some small FePt grains were observed on trapezoidal islands. The second nucleated FePt grains were deteriorated the orientation, and out-of-plane coercivity. With the same segregants (BN, Ag, C), the FePt grains morphology and contact angle were changed due to varied interface energy and the FePt grains were more de-wetted on MgTiON than on MoC surface. The FePt film with (BN, Ag, C) segregants was suitable to prepare on MgTiON intermediate layer to have higher out-of-plane coercivity and columnar grains morphology.
In the second part, magnetic and microstructural properties of granular FePt films mixed with a novel Mg(Ti, Ta, Zr, Nb, B)O multiple-oxide segregant material were investigated. Two different series of samples were prepared. In series (I), a Mg(Ti, Ta, Zr, Nb, B)O(t) (t = 2, 4, 6 nm) interlayer was deposited under a 10 nm thick FePt layer; in series (II), FePt(2nm)/[Mg(Ti, Ta, Zr, Nb, B)O(t nm)/FePt(4nm)]2 (t=0.5, 1, 1.5) multilayer stacks consisting of FePt films interleaved with Mg(Ti, Ta, Zr, Nb, B)O layers were prepared. Overall, the granular FePt films present a preferential perpendicular anisotropy, the coercivity being however lower than that of the reference FePt films, likely because of diffusion of metallic elements from the segregant interlayer into the FePt grains. Such an effect is more extended in sample series (II) because of the multilayer structure and lower coercivity values are achieved. However, using a multilayer stack allows obtaining FePt films with a better (001) crystallographic texture and a dense dome-like morphology that is closed to the expected columnar grains structure; thus, indicating that such a strategy and the proposed segregant material are of potential interest for the development of the FePt-based magnetic recording media.
URI: http://hdl.handle.net/11455/97834
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