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標題: 奈米球微影技術製備金屬網格透明電極
Fabrication of Metal Mesh Transparent Conductive Films Using Nanosphere Lithography
作者: 鄭名哲
Ming-Zhe Zheng
關鍵字: 金屬網格;奈米球微影;Metal mesh;Nanosphere Lithography
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我們成功製備出800 nm及2000 nm聚苯乙烯球單層緊密排列結構,將奈米球模板透過氧電漿蝕刻、濺鍍及奈米球舉離即可得到網格結構。實驗中可以得知,隨著銀厚度提高,光穿透下降,且在紅外光區有光穿透提高現象,此現象與表面電漿極與電磁波共振耦合有關◦
以800 nm及2000 nm聚苯乙烯為模板所製備出的網格分別在Ag 20 nm/ITZO 40 nm及Ag 30 nm/ITZO 40 nm有最高的品質因子,其值分別為3.1 mΩ-1及1.1 mΩ-1。從實驗中可以得知,在濺鍍過程,原子會散射進奈米球底下,導致線寬變大使光穿透下降,進而使品質因子下降。以2000 nm聚苯乙烯為模板製備出的網格其光穿透較高,但由於網格線寬有部分為不連續,因此造成電阻值提高,進而使品質因子降低。

Metal mesh has high light transmission, high conductivity and high flexibility, so it is considered to be used to replace the indium tin oxide(ITO)which is commonly used for transparent conductive electrode. We use nanosphere lithography to prepare silver metal mesh.the advantages of nanosphere lithography are low cost and convenient. Since silver is easily oxidized to silver oxide, indium-zinc-oxide (ITZO) is deposited to protect silver. ITZO has good photoelectric properties in the normal temperature process, and it can also improve the overall light transmission.
We have successfully prepared single layer closed-packed structure of 800nm and 2000nm polystyrene spheres.Metal mesh was obtained by oxygen plasma etching the nanosphere template、sputtering and nanosphere lift-off. It can be known from the experiment that as the thickness of silver increases, the light transmission decreases, and the light reflection increases.In the infrared light region,we also observe the extraordinary optical transmission.This phenomenon is related to the resonance coupling of the surface plasma and the electromagnetic wave.
The meshes prepared by using 800nm and 2000nm polystyrene as templates have the highest figure of merit in Ag 20nm/ITZO 40nm and Ag 30nm/ITZO 40nm respectively, and their values are 3.1mΩ-1 and 1.1mΩ-1. It can be known from the experiment that during the sputtering process, the atoms will scatter into the bottom of the nanosphere.It causes the line width of mesh to increase and the light transmission to decrease, thereby degrading the figure of merit. The mesh prepared by using 2000 nm polystyrene as a template has high light transmission,but since the line width of mesh is partially discontinuous,the resistance value is increased, and the figure of merit is decreased.
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