Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/97979
標題: 原子層沉積成長之β-型氧化鎵紫外光偵檢元件物理特性之研究
Investigation on the physical properties of β-Ga2O3 ultra-violet detectors prepared by atomic layer deposition
作者: 彭德揚
De-Yang Peng
關鍵字: 紫外光偵測器;金半金結構;β-氧化鎵;原子層沉積法;photodetector;MSM;β-Ga2O3;atomic layer deposition
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摘要: 
本論文探討β-氧化鎵金屬-半導體-金屬(MSM)作為紫外光偵測器之元件暨結構等物理特性。β-氧化鎵薄膜採用原子層沉積法生長於氧化鋁基板上。β-氧化鎵薄膜原子層沉積法製程中,採用三乙基鎵(TEGa)和氧化亞氮(N2O)做為前驅氣體生長β-氧化鎵薄膜。β-氧化鎵MSM紫外光偵測器製作,則先將光罩貼在β-氧化鎵薄膜上,使用磁控濺鍍法將指叉金電極接至β-氧化鎵薄膜上,用以完成金屬-半導體-金屬之結構。β-氧化鎵薄膜之表面型態與各項物理特性使用掃描電子顯微術、X-光繞射儀分析;金-β-氧化鎵-金MSM紫外光偵測器之電性量測則以Keithely2400型分析儀來分析。依據X-光繞射儀分析之繞射圖可以觀察到在600⁰C下生長之氧化鎵薄膜為β相。且β-氧化鎵MSM紫外光偵測器之電流-電壓曲線顯示在未吸收光時,暗電流約為10-10~10-9安培、在收365nm的紫外光時且外加偏壓為5V時,光電流約為10-8安培、在吸收254nm的紫外光時光電流約為10-4安培,再次顯示金-(β-氧化鎵)-金之金屬-半導體-金屬(MSM)結構對於254nm紫外光之偵測相當顯著,有利於紫外光偵測器之應用。

In this thesis, β-Ga2O3 thin films were prepared by atomic layer deposition (ALD) deposited at 600oC under atmospheric pressure using triethylgallium (TEGa) and nitrous oxide (N2O) precursors as sources of Ga and O element in β-Ga2O3 thin film. To fabricate a solar-blind photodetector, interdigital Au electrode was deposited on the β-Ga2O3 thin film using shadow mask by magnet sputtering. The physic properties of β-Ga2O3 thin films were characterized using scanning electron microscopy (SEM) and θ-2θ X-ray diffractometer (XRD). The thicknesses of the β-Ga2O3 thin films were measured by cross-sectional SEM images. Based upon the XRD data, it appears that ALD-grown Ga2O3 thin film were β type in nature. The I-V curves of Au-(β-Ga2O3)-Au metal-semiconductor-metal (MSM) structure were measured by Keithley model 2400 source unit. According to the I-V plots, it shows that the dark current of the β-Ga2O3 MSM structure remains approximately 10-9 A. The photo current stays at 4×10-6 A and 1.5×10-3 A by applying a bias of 10V on the β-Ga2O3 MSM structure under 365nm and 254nm UV illumination ,respectively. It is evident that the ALD-grown β-Ga2O3 MSM structure is very sensitive to the 254nm UV illumination. Thus, it is suitable to serve as a solar blind photodetector.
URI: http://hdl.handle.net/11455/97979
Rights: 同意授權瀏覽/列印電子全文服務,2021-08-28起公開。
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