Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/9802
標題: 脈衝電漿對類鑽薄膜性質影響
Influence of pulsed plasma on properties of DLC thin films
作者: 謝炎璋
Hsieh, Yen-Chang
關鍵字: Diamond-like carbon;類鑽薄膜;pulsed power;closed field unbalanced magnetron system;脈衝電源;封閉式磁控系統
出版社: 材料工程學研究所
摘要: 
Abstract
Application of steady direct current (DC)power to reactive sputtering of dielectrics such as Al2O3 and Diamond-like carbon(DLC)is seriously hampered by arcing. In the deposition processing, insulated layers charge up until breakdown occurs in the form of an arc. Many different deposition technologies have been described for producing these DLC coating. High quality diamond-like carbon (DLC) coatings can be routinely produced in r.f. (13.56 MHz) based capacitive coupled plasma-assisted chemical vapor deposition processes. In practice, this process is limited to relatively small batch volumes (<1 m3). This Arcing can be alleviated to a great extent when pulsed DC power is applied. Bipolar-pulsed d.c. processes may offer an alternative to way forward to large-scale processing. With bipolar pulsed power, the polarity of the power is switched from negative to positive, and during the positive pulse charging of the carbide layer is discharged when electron are attracted to the positive surface. During the negative pulse, ions are attracted to the surface, and sputtering takes place initially formed a insulate compound since the charge on the surface has been neutralized during the positive pulse. This method could avoid arcing by completely discharging the dielectric surface. The pulsed power supply has more complicate parameter to be control (pulse frequency, revere time, reverse voltage etc). It can be used to produce much more energetic particles during part of the pulse cycle and control ion current density to avoid the arc events.
Sputtering graphite and titanium targets in a pure argon atmosphere which using the closed field unbalanced magnetron system(CFUMS)produces the DLC. Available as a pure carbon or multiplayer coating, which approach for the toughness improvement was to use a multiplayer architecture. The superhard DLC layers were separated with metal layers and incorporated in functionally gradient coating to accommodate stresses and reduce microcracking. The adhesion of DLC films on steel substrates was 73N, which defined by scratch tester and Rockwell indentation. The microhardness of DLC films deposited on the substrate of D2 steel with a hardness of 4250Hv was measured and compared to the hardness of the substrate material.

Abstract
Application of steady direct current (DC)power to reactive sputtering of dielectrics such as Al2O3 and Diamond-like carbon(DLC)is seriously hampered by arcing. In the deposition processing, insulated layers charge up until breakdown occurs in the form of an arc. Many different deposition technologies have been described for producing these DLC coating. High quality diamond-like carbon (DLC) coatings can be routinely produced in r.f. (13.56 MHz) based capacitive coupled plasma-assisted chemical vapor deposition processes. In practice, this process is limited to relatively small batch volumes (<1 m3). This Arcing can be alleviated to a great extent when pulsed DC power is applied. Bipolar-pulsed d.c. processes may offer an alternative to way forward to large-scale processing. With bipolar pulsed power, the polarity of the power is switched from negative to positive, and during the positive pulse charging of the carbide layer is discharged when electron are attracted to the positive surface. During the negative pulse, ions are attracted to the surface, and sputtering takes place initially formed a insulate compound since the charge on the surface has been neutralized during the positive pulse. This method could avoid arcing by completely discharging the dielectric surface. The pulsed power supply has more complicate parameter to be control (pulse frequency, revere time, reverse voltage etc). It can be used to produce much more energetic particles during part of the pulse cycle and control ion current density to avoid the arc events.
Sputtering graphite and titanium targets in a pure argon atmosphere which using the closed field unbalanced magnetron system(CFUMS)produces the DLC. Available as a pure carbon or multiplayer coating, which approach for the toughness improvement was to use a multiplayer architecture. The superhard DLC layers were separated with metal layers and incorporated in functionally gradient coating to accommodate stresses and reduce microcracking. The adhesion of DLC films on steel substrates was 73N, which defined by scratch tester and Rockwell indentation. The microhardness of DLC films deposited on the substrate of D2 steel with a hardness of 4250Hv was measured and compared to the hardness of the substrate material.
URI: http://hdl.handle.net/11455/9802
Appears in Collections:材料科學與工程學系

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