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標題: 顯微結構對奈米複層DLC磨耗性質之影響
Influence of Microstructure on Wear Properties of Nano-composite DLC films
作者: 張智豪
Chang, Chih-Hao
關鍵字: 類鑽薄膜DLC;非平衡磁控濺射UBM;multilayer;wear properity
出版社: 材料工程學研究所
Diamond-like carbon (DLC) films possess significant advantages in cutting and forming of non-ferrous materials. Diamond-like carbon film is characterized by its extreme hardness (1000-3000kg.mm2) and low friction coefficient (0.01-0.28 against various metals). However, further improvement in fracture toughness and interface adhesion is required for certain high demanding applications such as deep drawing and semiconductor molding. In this study, metal-doped DLC films were synthesized using unbalanced magnetron sputtering (UBMS) process with a combination of graphite and metal targets. The result is a nano-composite DLC film with interlaced metal interlayers. The cathode currents and rotation speed of substrate holder control the thickness of each interlayer. A pulsed d.c. power supply, with 20-100 kHz variable-frequency was applied to the substrates to control the substrate arcing and radical excitation during the DLC formation. The influences of deposition parameters on film qualities were investigated. Microstructure of the nano-composite DLC film was investigated by using cross-section TEM/SAD, x-ray spectroscopy, Raman and XPS. The correlation between the microstructure and the tribological properties of DLC will be analyzed.
Appears in Collections:材料科學與工程學系

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