Please use this identifier to cite or link to this item:
Influence of Microstructure on Wear Properties of Nano-composite DLC films
Diamond-like carbon (DLC) films possess significant advantages in cutting and forming of non-ferrous materials. Diamond-like carbon film is characterized by its extreme hardness (1000-3000kg.mm2) and low friction coefficient (0.01-0.28 against various metals). However, further improvement in fracture toughness and interface adhesion is required for certain high demanding applications such as deep drawing and semiconductor molding. In this study, metal-doped DLC films were synthesized using unbalanced magnetron sputtering (UBMS) process with a combination of graphite and metal targets. The result is a nano-composite DLC film with interlaced metal interlayers. The cathode currents and rotation speed of substrate holder control the thickness of each interlayer. A pulsed d.c. power supply, with 20-100 kHz variable-frequency was applied to the substrates to control the substrate arcing and radical excitation during the DLC formation. The influences of deposition parameters on film qualities were investigated. Microstructure of the nano-composite DLC film was investigated by using cross-section TEM/SAD, x-ray spectroscopy, Raman and XPS. The correlation between the microstructure and the tribological properties of DLC will be analyzed.
|Appears in Collections:||材料科學與工程學系|
Show full item record
TAIR Related Article
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.