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Using Bulge test for the Mechanical Behavior Study of Submicrometer TiNi Alloy Thin Films
|關鍵字:||鈦鎳合金;形狀記憶合金;鼓膜隔艙試驗;機械性質;殘留應力;熱處理;循環測試;TiNi Alloy;SMA;bulge test;mechanical properties;residual stress;heat treatment;fatigue||引用:|| J. A. Walker, K. J. Gabriel, and M. Mehregany, 'Thin-film processing of TiNi shape memory alloy,' Sensors and Actuators A: Physical, vol. 21, no. 1, pp. 243-246, 1990/02/01/ 1990.  K. Kuribayashi, M. Yoshitake, and S. Ogawa, 'Reversible SMA actuator for micron sized robot,' in Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE, 1990, pp. 217-221: IEEE.  W. L. Benard, H. Kahn, A. H. Heuer, and M. A. Huff, 'Thin-film shape-memory alloy actuated micropumps,' Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 245-251, 1998.  A. D. Johnson and C. A. Ray, 'Shape memory alloy film actuated microvalve,' ed: Google Patents, 1994.  M. Kohl, B. Krevet, and E. Just, 'SMA microgripper system,' Sensors and Actuators A: Physical, vol. 97, pp. 646-652, 2002.  B. 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In this study, the Bulge Test was used to investigate the mechanical properties and residual stress of TiNi shape memory alloy film under different post-annealing temperature. The fatigue test showed the fatigue resistance of TiNi film. The relationship between the change of the microstructure and the crystalline phase and the mechanical properties was observed by SEM and XRD. From the results of SEM and XRD analysis, we can observe that as the annealing temperature increases, the Ti atoms on the surface of the TiNi film annealed in the atmosphere easily form a brittle layer of TiO2 with oxygen, while annealing under high vacuum and in N2 environment can effectively avoid the surface of the TiNi film oxidized, and the condition under high vacuum environment had the best effect, and the degree of crystallization is obviously superior to other conditions. In the results of the bulge test. We can find that as the annealed temperature increase, the residual stress decreases obviously, and the Young's modulus increases. The results of SEM and XRD analysis can determine that the formation of precipitates such as TiO2 and Ti3Ni4 on the surface as the annealing temperature increases. The R phase was introduced into the austenite matrix, which leads to an increase in the Young's modulus of the TiNi film. In the fatigue test, the residual stress released after fatigue decreases as the annealing temperature increases. The FWHM changes are analyzed by XRD, and the TiNi film is judged to be at The first stage of fatigue shows good fatigue resistance.
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