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標題: 雷射直析技術製作微米級三維結構與製程熱流傳遞現象模擬分析
Fabrication of three-dimensional micro-structures by laser direct synthesis and analysis of the thermal–fluids transport phenomena of the process
作者: 黃佩君
Pei-Jun Huang
關鍵字: 雷射直析技術;三維金屬微結構;雷射微積層製造;Laser-direct-synthesis and patterning;Three-dimensional metallic microstructure;Laser-additive micro-fabrication
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本研究利用雷射直析技術 (Laser direct synthesis and patterning, LDSP) 製作微米尺寸的三維導電結構。此技術相對於微機電製程的優點為能在常溫、常壓下進行,製程步驟簡易,並且製程溶液能回收再利用,具備綠色製程的優點。

In this study, laser direct synthesis and patterning (LDSP) was used to fabricate three-dimensional metallic microstructure. Compared to conventional microfabrication processes, the main advantage of this technology is that it can be carried out under normal temperature and pressure, and the process solution can be easily recycled and reused.
  In a typical process, the process ionic solution containing absorbing material, is irradiated with laser directly to initiate the reduction reaction in the ionic solution near to the surface of the substrate. Microstructure is formed once the reaction temperature is reached in the solution. A continuous laser with a wavelength of 655 nm is used as a heating source. The substrate is immersed into a tank containing the reaction solution. The substrate is moved down by the high precision moving stage, and growing the metal microrod structure upward from the surface of the substrate. The microstructure is then successfully by pilling up on the fabricated structure layer.
  In addition, a comprehensive investigation on the process parameters were set by an orthogonal table with the following parameters: laser power, stage moving speed, reaction solution mixing ratio, and the influence of process parameters on the results of the metal microstructures was discussed. One of the most important goal is to optimize the flatness, diameter and conductivity of the metal microstructures. Furthermore, the phenomenon near the heat source in the processing area is analyzed by COMSOL Multiphysics software including thermalfluid transport and liquid-solid phase change. The variation of the diameter corresponding to different process parameters were investigated and discussed. The simulation technology and model can be used in the future for optimizing process parameters.
Rights: 同意授權瀏覽/列印電子全文服務,2018-12-03起公開。
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