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A Study of Effects on Thermal Fluid Transports with Fan Filter Units in a Clean Room Oven Area
|關鍵字:||無塵室;風扇過濾機組;微塵粒子;Clean Room;Fan Filter Unit;Dust Particle||引用:||R. B. Dean and W. Dixon, 'Simplified statistics for small numbers of observations' Analytical Chemical ,vol. 23, pp. 636-638, 1951. Launder, B.E and Spalding, Dg.B.'Mathematical models of Turbulence 'Academic Press. London and New York,1972. S.Hu,Y. Wu,C.Liu, 'Measurements of air flow characteristics in a full-scale clean room,' Building and Environment, vol. 31, pp. 119-128, 1996. M.Cheng, G.Liu,K.L.W.Cai,and E. Lee, 'Approaches for Improving airflow uniformity in unidirectional flow clean rooms,'Building and Environment,vol.34,pp.275-284, 1998. J.A.Schetz and A.E.Fuhs, 'Fundamentals of fluid mechanics': John Wiley ,Sons,edit,1999. J.Schliesser and P.Staudt-Fischbach,'Mini environments and thermal effects,' in Advanced Semiconductor Manufacturing Conference and Workshop, IEEE/SEMI, pp.432-439, 1999 ISO,'14644-1 Clean rooms and Associated Controlled Environments-Part 1,'Classification of Air Cleanliness, 1999. S.J.Prowell,C.J.Trammell,R.C.Linger,and J.H.Poore, Clean room software engineering,technology and process,1999. W.Whyte, Clean room design: Wiley Online Library,1999. 魏嘉言，計算流力程式在無塵室空氣流場分析之應用，碩士論文，國立清華大學工程與系統科學系，2000。 吳仁傑，微環境特性之研究，碩士論文，國立台北科技大學冷凍空調系，2001。 胡石政，李昇榮，林瑋義，詹皇烈，無塵室使用 FFU 之出風氣流性能量測與分析，冷凍空調期刊，2001。 董春雲，以數值模擬分析亂流型無塵室之通風性能，碩士論文，國立台北科技大學冷凍空調系，2001。 洪嘉宏,，射出成形機之微環境潔淨室內氣流組織及污染濃度控制分析，碩士論文，國立中山大學機械與機電工程系，2003。 H.-R.Shiu, H.-Y. Huang, S.-L. Chen, M.-T.Ke, Numerical simulation for air flow in the mini-environment and SMIF enclosure,' IEEE transactions on semiconductor Manufacturing, vol. 16, pp. 60-67, 2003. K.T.Hallstrom﹐'Organizing international standardization:ISO and the IASC in quest of authority,2004. Testo 400,Testo,Lenzkirch,Germany,2004. B. Zhao and J. Wu, 'Numerical investigation of particle diffusion in a clean room,' Indoor and Built Environment, vol. 14, pp.469-479, 2005. C.-H.Cheng and K.-S.Hung,'Experimental and numerical study of three-dimensional flow field in mini environment,'Energy and buildings,vol.37,pp.579-586,2005. D.A.Nield, A.Bejan, and Nield-Bejan. Convection in porous media vol.3,2006. 黃佳松，半導體廠無塵室氣流模擬分析與省能運轉策略，碩士論文，台北科技大學冷凍空調工程系，2006。 T.Xu,'Characterization of mini environments in a clean room:design characteristics and environmental performance,'Building and Environment,vol.42,pp.2993- 3000,2007. 工業技術研究院，綠能與環境研究所無塵室節約能源技術，技術手冊，第1-18頁，2009。 W.Whyte,Clean room technology:fundamentals of design,testing and operation: John Wiley & Sons,2010. MET ONE 3400 USER MANUAL HACH Company,2010. K.-C. Noh, H.-S. Kim, and M.-D. Oh, 'Study on contamination control in a mini environment inside clean room for yield enhancement based on particle concentration measurement and airflow CFD simulation,' Building and Environment, vol. 45, pp. 825-831, 2010. 陳彥志，胡石政，林迪，張振光，邱俊榮, 不同供風層壓力及回風方式對無塵室流場及溫度分佈的影響，冷凍空調與能源科技雜誌，第82-95頁，2010。 ANSYS Fluent, 'Release 15.0,' Theory Guide,2013. 胡石政，無塵室設計之無塵室分類原理及其特點，第四章 國立台北科技大學冷凍空調工程系，2014。 劉永斌，無塵室高架式地板通風對室內流場的影響，國立中興大學機械工程學系，2014。 FlukeTIS40,Fluke Corporation,Everett,WA,USA,2015. A. Khaokom, J. Thongsri, and P. Kaewkhaw, 'A CFD investigation of airflow in a hard disk drive production line to detect the cause (s) of contamination and its mitigation,' IEEE Third International Conference on Engineering Technology and Social Sciences(ICETSS)pp.1-4, 2017.||摘要:||
本論文探討無塵室Class100區域中，烤箱製程所在區間當烤箱門扇打開與關閉時所產生的熱源對於區間中均溫性的影響。運用有限元素軟體Fluent，調整風扇過濾機組 (Fan Filter Unit, FFU)風速(0.2m/s，0.3m/s，0.4m/s，0.5m/s)，分析該空間區域的溫度變化，分析模擬結果與實際現場量測所得熱流場相關數據進行比對及探討。
This study was aimed to investigate the influence on temperature uniformity in a Class 100 clean room as the door of an oven used in the room was opened and closed during the oven process. The finite element analysis program, Fluent, was introduced for analysis. The fan filter units (FFU) were regulated to produce velocity (0.2m/s, 0.3m/s, 0.4m/s, and 0.5m/s). The temperature changes in the space were analyzed and the results from the simulation were compared with thermal flow field measured in the space.
The clean room studied was sized 4.5m L * 4m W * 7m H. The results from finite element analysis revealed that the temperature uniformity in the process space was optimized when the FFU produced velocity at 0.3m/s; however, effective suppression was not achieved for the quantity of dust particles. By increasing the velocity to 0.5m/s, the dust particles control was effective but the temperature uniformity was less than satisfactory and the vortices became larger at the area without FFUs, resulting in increasing quantity of dust particles. A further look into the analysis was conducted and the dust particles quantity was measured from 1m to 6m at areas where there were provided with FFUs and those without below the ceiling. The results indicated that the optimal FFU velocity was 0.4m/s; dust particles were concentrated under the ceiling where there was no air vent; and dust particles hanging mid-air were most likely to be found between 1 m and 3 m from the floor.
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