Electrostatic metallic glass micro-mirror fabricated by the self-aligned structures

Abstract

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REGULAR PAPER Electrostatic metallic glass micro-mirror fabricated by the self-aligned structures Zhao-Ying Wang1,2, Yu-Yen Chen1, Yu-Ching Lin3, Takahito Ono4, Ming-Tzer Lin2 and Yao-Chuan Tsai1

Published 6 March 2020 • © 2020 The Japan Society of Applied Physics Japanese Journal of Applied Physics, Volume 59, Number SI Citation Zhao-Ying Wang et al 2020 Jpn. J. Appl. Phys. 59 SIIL02 344 Total downloads 11 citation on Dimensions. Turn on MathJax Get permission to re-use this article

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Share this content via email Share on Facebook (opens new window) Share on Twitter (opens new window) Share on Mendeley (opens new window) Article information Abstract In this work, an electrostatic comb-drive micro-mirror with the Pd-based metallic glass torsion bar and the self-aligned structures was proposed and developed. The self-aligned structure of the comb-drive micro-mirror is achieved avoiding the comb structure alignment process. The fixed combs of the top mirror wafer were lifted by the bottom activation post for making the comb height difference. The height difference between the fixed combs and moving combs could effectively increase the torque to the mirror structure. The static tilting angle of 16° was achieved when the input voltage is 45.6 V. In the resonant mode, the scanning angle of 40.5° was achieved when the input voltage is 30 Vpp at 95 Hz. According to the measurement results and comparing with other silicon torsion bar micro-mirrors, the driving voltage could be decreased 50% and the tilting angle could be increased around four times for the proposed micro-mirror.