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標題: Study and fabrication of a flexible Zr-based metallic glass thin film strain gauge
作者: Yen-Chi Lu 
Chun-Yu Chian 
Yu-Chieh Chen 
Yu-Ching Lin 
Takahito Ono 
Yao-Chuan Tsai 
Metallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.
Appears in Collections:生物產業機電工程學系

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