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dc.contributor.authorYen-Chi Luzh_TW
dc.contributor.authorChun-Yu Chianzh_TW
dc.contributor.authorYu-Chieh Chenzh_TW
dc.contributor.authorYu-Ching Linzh_TW
dc.contributor.authorTakahito Onozh_TW
dc.contributor.authorYao-Chuan Tsaizh_TW
dc.description.abstractMetallic glass is an amorphous structure and has excellent mechanical properties such as high strength, hardness and elastic strain limitation. In this study, a Zr-based metallic glass thin film was deposited on a polymer substrate using the sputter technique for strain gauge applications. A copper thin film strain gauge was fabricated to compare with the properties of the Zr-based strain gauge. Different thicknesses of the thin films were fabricated for comparison. The gauge factor of the Zr-based strain gauge is 2.4 times higher than that of the copper strain gauge. The temperature coefficient of resistance of the Zr-based metallic glass thin film is extremely low, 8 × 10-6 °C-1, which is essential to reduce thermal drift for strain gauge applications.zh_TW
dc.titleStudy and fabrication of a flexible Zr-based metallic glass thin film strain gaugezh_TW
dc.typejournal articlezh_TW
item.openairetypejournal article-
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Appears in Collections:生物產業機電工程學系
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